English to Japanese Tech/Engineering Chemistry; Chem Sci/Eng Thermal oxidation

In the H2O2 combustion, pure hydrogen is added to oxygen. The gases are led into the quartz tube and burned in a ***cold combustion*** at above 500 °C to avoid Knallgas reaction. This process allows the fabrication of fast growing and only low impurified films, so that thick oxide layers as well as thin films at moderate temperatures (900 °C) can be procuded. The low temperature also allows fabrication of wafers which were alread doped.